HIGH-PRECISION PRESSURE SENSOR BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM Russian patent published in 2015 - IPC G01L9/00 B82B3/00 

FIELD: measurement equipment.

SUBSTANCE: sensor comprises a body, a nano- and microelectromechanical system (NMEMS) installed in it and comprising an elastic element - a membrane with a stiff centre, with a peripheral base in the form of a rotation shell, a heterogeneous structure formed on it from thin films of materials, in which contact sites are formed, the first radial resistance strain gauges from identical strain gage elements, arranged along one circumference of the membrane, and the second radial resistance strain gages from identical strain gage elements, arranged along the other circumference on the membrane, connected by links and into the measurement bridge. The radius of the stiff centre is determined on the basis of the following ratio: r_s.c.=0.42r_m, where r_m - membrane radius. At the same time strain gage elements of the first radial resistance strain gages are arranged along the circumference, the radius of which is determined on the basis of the ratio r₁=0.444r_m, and strain gage elements of the second radial resistance strain gages are arranged along the circumference, the radius of which is determined on the basis of the ratio r₂=0.733 r_m.

EFFECT: increased accuracy due to higher sensitivity with simultaneous reduction of non-linearity.

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