SEMICONDUCTOR SENSOR OF CARBON OXIDE Russian patent published in 2017 - IPC G01N27/12 

FIELD: measuring equipment.

SUBSTANCE: according to the invention the sensor comprises of a semiconductor base (1) made as a polycrystalline film of a substitutional solid solution of composition (CdTe)_0.95(InSb)_0.05. The polycrystalline InSb film (CdTe)_0.95(InSb)_{0.05 is} deposited on the electrode pad (2) of the piezoquartz resonator (3).

EFFECT: with significant simplification of its manufacturing process, the invention provides for the determination of carbon oxide content with a sensitivity higher than the one of the known sensors.

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