FIELD: chemistry.
SUBSTANCE: sensor has a semiconductor base and a substrate. The semiconductor base is made from a nano-sized film of cadmium telluride doped with zinc selenide. The electrode platform of a piezoelectric crystal resonator serves as the substrate.
EFFECT: high sensitivity of the sensor and its manufacturability.
1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| SEMICONDUCTIVE ANALYZER OF CARBON OXIDE | 2016 |
|
RU2631010C2 |
| GAS ANALYSER OF CARBON OXIDE | 2009 |
|
RU2395799C1 |
| NANO-SEMICONDUCTOR GAS SENSOR | 2010 |
|
RU2458338C2 |
| SEMICONDUCTOR SENSOR OF CARBON OXIDE | 2016 |
|
RU2637791C1 |
| SEMICONDUCTOR GAS SENSOR OF AMMONIA TRACE IMPURITIES | 2015 |
|
RU2607733C1 |
| CARBON MONOXIDE TRANSDUCER | 2006 |
|
RU2326371C1 |
| CARBON MONOXIDE SENSOR | 2020 |
|
RU2733799C1 |
| SEMICONDUCTOR SENSOR OF CARBON OXIDE | 2019 |
|
RU2739146C1 |
| NANO-SEMICONDUCTOR GAS ANALYSER | 2010 |
|
RU2423688C1 |
| SEMICONDUCTOR GAS SENSOR FOR OXYGEN TRACE SUBSTANCES | 2015 |
|
RU2610349C1 |
