FIELD: gas analysis.
SUBSTANCE: invention relates to the field of gas analysis, in particular to detecting devices for measurement of content of micro impurities of carbon oxide and other gases. Semiconductor gas sensor has a semiconductor base and a substrate, wherein the semiconductor base is made from a polycrystalline film of solid solution (CdTe)0.74(CdSe)0.26, and the substrate is the electrode pad of a piezoelectric resonator.
EFFECT: higher sensitivity of the sensor.
1 cl, 3 dwg
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Authors
Dates
2020-10-06—Published
2020-02-21—Filed