SEMICONDUCTIVE ANALYZER OF CARBON OXIDE Russian patent published in 2017 - IPC G01N27/12 

FIELD: measuring equipment.

SUBSTANCE: sensor consists of a semiconductor substrate 1 made in the form of a polycrystalline film of a solid solution of composition (CdSe)_0.85(CdTe)_0.15 and the substrate to which the electrode pad 2 of the piezoquartz resonator 3 serves.

EFFECT: sensor made according to the invention with a significant simplification of the technology of its manufacture, allows to determine the content of carbon oxide with a sensitivity which is several times higher than the sensitivity of known sensors.

3 dw