FIELD: technological processes.
SUBSTANCE: invention is related to method for manufacture of tubular target and may find application in manufacture of flat LC-display screens according to thin-film technology. Tubular target consists of tube made of molybdenum or molybdenum alloy with oxygen content of less than 50 mg/g, density of more than 99% from theoretical density and average size of grain across axial direction of less than 100 mcm and bearing tube made of non-magnetic material. Metal powder is produced from Mo or Mo alloy with average size of particles by Fisher from 0.5 to 10 mcm. Powder is used to fill elastic die mold with application of rod. Cold isostatic pressing is carried out at pressure of 100 MPa<P<500 MPa to produce green compact in the form of tube blank. Then green compact is baked at the temperature of 1600°C<T<2500°C in restorative atmosphere or vacuum. Extrusion is done in holder with heating of tube blank up to moulding temperature of DBTT<T<(Ts minus 800°C), where DBTT is ductile to brittle transition temperature, Ts is melt temperature, with tube production, tube is connected to bearing tube, and mechanical treatment is carried out.
EFFECT: tubular target is produced, which uniformly erodes in process of ion dispersion, has no trend for local increase of dispersion rate and does not result in any contamination of substrate or deposited layer.
51 cl, 1 ex
