FIELD: physics.
SUBSTANCE: double-beam ion source consists of a housing in which there are two independent ion beam sources which form two independent and non-crossing beams directed in different sides. The housing is divided by a common cathode into two coaxial insulated gas-discharge chambers, and each gas-discharge chamber has its own anode and system for supplying working gas, where the common cathode is electrically connected to the housing.
EFFECT: design of two independent and non-crossing beams, directed in different sides in a single ion source.
2 cl, 1 dwg
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