DEVICE AND METHOD FOR THERMAL DECOMPOSITION OF VOLATILE COMPOUNDS OF ELEMENT SELECTED FROM GROUP COMPRISING SILICON, GERMANIUM, CARBON, TITANIUM, ZIRCONIUM AND MIXTURE THEREOF Russian patent published in 2009 - IPC B01J19/24 C01B33/29 

FIELD: chemistry.

SUBSTANCE: invention can be used for producing powder-like silicon, germanium, carbon, titanium, zirconium and their mixture, used in electronics. The device for thermal decomposition includes: a pressure vessel 1, reaction tube 2, the open end of which runs into the pressure vessel 1, and the other end lies outside of the pressure vessel and is fitted with a gas supply apparatus 3. The longitudinal axis of the reaction tube 2 is directed towards the force of gravity and is parallel to the longitudinal axis 1d of the pressure vessel 1. The reaction tube 2 can be heated 2a at the gas inlet side and cooled 2b at the gas outlet side. The pressure vessel 1 has in its bottom part a collecting funnel 1a. The open end 2c of the reaction tube 2 runs to the gas space 1b of the collecting funnel 1a. The collecting funnel 1a is connected to the outlet seal 6 for particles (P). The gas outlet unit 7 is fitted with a guide for gas 7a. Gas inlet region 7b is linked to the gas space 1b of the collecting funnel 1a, filter system 8 and gas outlet 9, which lies outside the pressure vessel 1.

EFFECT: invention prevents clogging of the pipes of the reactor and contamination of the end product.

19 cl, 1 dwg