FIELD: probe scanning microscopy.
SUBSTANCE: proposed method for measuring and recording deviation of probe bracket in scanning microscope equipped with optical lens for viewing specimen area under inspection includes shaping of beam from light source, its passage through lens to reflecting surface of probe bracket, generation of light spot on sensing surface of segmental photodetector by means of lens, and recording of changes in light spot position on sensing surface of photodetector. Disposed behind light source are long-focus, variable-focal-length lens and beam splitter. Beam divergence is shaped so as to ensure that beam passed through lens will be brought in focus (form caustic) on reflecting surface of probe bracket.
EFFECT: enhanced sensitivity of probe deviation recording system in scanning microscope.
6 cl, 4 dwg
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