METHOD FOR MANUFACTURING OF DEVICE FOR DETECTION OF HEAT RADIATION COMPRISING ACTIVE MICROBOLOMETRE AND PASSIVE MICROBOLOMETRE Russian patent published in 2010 - IPC G01J5/10

Abstract RU 2386934 C2

FIELD: physics.

SUBSTANCE: passive microbolometre (12) comprises reflecting screen (17) and suspended membrane with function of radiation absorption, thermometre and electrical connection. Membrane is supported by at least two elements (15) of fixation installed on support substrate (16). Reflecting screen (17) may be arranged on the basis of at least one layer (18) of metal material. Screen (17) is arranged below membrane in electric contact with membrane element (13) for radiation absorption.

EFFECT: manufacturing of protective screen is integrated in process of passive microbolometre manufacturing.

3 cl, 7 dwg

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Authors

Uvrier-Bjuffe Zhan-Lui

Karl' Loran

Viall' Klehr

Vilen Mishel'

Dates

2010-04-20—Published

2005-03-04—Filed