FIELD: process engineering.
SUBSTANCE: invention relates to production of nano-size metal diaphragms. First, layer of metal, silver or gold, is sprayed onto solid acetate substrate deposited onto supporting metal screen and, above said layer, carbon layer is deposited. Note here that carbon spraying factor is smaller than that of metal. Then acetate substrate is dissolved and obtained two-layer film is subjected to ion etching till nano-holes are produced. Now strengthening 100-to-200 nm-thick layer of carbon is additionally sprayed on said film with nano-holes.
EFFECT: nano-size metal diaphragms with high resistance to external effects.
6 cl, 1 ex, 3 dwg
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