FIELD: process engineering.
SUBSTANCE: invention relates to production of membranes with regular nanopores used for micro-nanofiltration, water and gas purification etc. Layer of anode oxide with hexagonal canalised columnar structure is formed on one side of metal foil or thin metal film of high-purity barrier-film metal. Then plasma etching of the film non-anodised side or thin metal film to remove remaining metal and continuous oxide barrier layer that block channels and to produce through nanoholes in oxide film.
EFFECT: reduced process time.
5 cl, 5 dwg, 1 ex
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