METHOD OF INSPECTING COMPOSITION OF MATERIAL DURING STRUCTURE FORMATION Russian patent published in 2010 - IPC G01N21/17 H01L21/66 B82B3/00 

FIELD: physics.

SUBSTANCE: in the method of inspecting composition of material during structure formation, ellipsometric parametres Ψ and Δ are measured and the derivative is calculated during layer formation. The function used is one of the ellipsometric parametres and the argument is the other ellipsometric parametre. Calculation results are fixed in a plane. The derivative of the ellipsometric parametre is an ellipsometric parametre in form of a curve from which optical constants and change in composition of the material of the layer. The derivative of the ellipsometric parametre is calculated with accuracy which is sufficient for representing the derivative of the ellipsometric parametre - ellipsometric parametre for correlation of the obtained curves with inspected layers with a different composition gradient which is given by the ellipsometre used during inspection.

EFFECT: possibility of non-destructive inspection of material as structures grow, including in multi-layer structures characterised by significant composition gradient.

9 cl, 4 dwg, 4 ex