PRESSURE SENSOR BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM FOR PRECISION MEASUREMENTS Russian patent published in 2014 - IPC G01L9/04 B81B3/00 

FIELD: measurement equipment.

SUBSTANCE: sensor comprises a body, a nano- and microelectromechanicall system (NMEMS) installed in it, comprising an elastic element in the form of a membrane with a stiff centre, embedded along the contour into the support base, a heterogeneous structure formed on it from thin films of materials, a sealing contact block and connecting conductors. Radial strain resistors formed in the heterogeneous structure installed on two circumferences comprise identical strain elements in the form of squares, connected by thin-film links and connected into a bridge measurement chain. Centres of the first and second strain elements are placed along circumferences with radii determined according to appropriate ratios. Between the membrane and stiff centre, and also the membrane and support base there are roundings with a certain radius.

EFFECT: increased accuracy and manufacturability.

1 tbl, 9 dwg