FIELD: measurement equipment.
SUBSTANCE: invention relates to the field of scanning probe microscopy and may be used under conditions of restricted access to probes, for example, in a vacuum or aggressive environment. The multiple-probe sensor of a contour type comprises a base, on which along the outer contour flexible consoles are fixed by the first ends, with the probes sharpened at second ends, where the flexible consoles with the probes are probe modules (8). The base includes a mounting module, having coordinate referencing with the probe modules (8) and including the first ledge (55), the second ledge (56) and a hole (57).
EFFECT: provision of a possibility of the quick replacement of the probes.
11 dwg
| Title | Year | Author | Number |
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| SCANNING PROBE MICROSCOPE | 2009 |
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|
RU2428700C2 |
