FIELD: process engineering.
SUBSTANCE: invention relates to separation of stable isotopes and may be used in semiconductor technology. Separation of germanium isotopes by centrifuging germanium volatile compound consists in that monogerman (GeH4) is fed for gas centrifuging as a germanium volatile compound and extracted as-enriched to target germanium isotope.
EFFECT: higher efficiency and extraction factor, simplified and safe process, lower costs.
2 tbl
| Title | Year | Author | Number |
|---|---|---|---|
| METHOD FOR PRODUCING ISOTOPICALLY ENRICHED GERMANIUM TETRACHLORIDE | 2022 |
|
RU2792381C1 |
| METHOD FOR OBTAINING ISOTOPE VARIETY OF ELEMENTARY GERMANIUM WITH HIGH ISOTOPE AND CHEMICAL PURITY | 2016 |
|
RU2641126C2 |
| METHOD OF PRODUCTION OF GERMANIUM FOR SEMICONDUCTING MATERIALS | 2004 |
|
RU2270715C1 |
| METHOD FOR EXPRESS ANALYSIS OF OBJECTIVE IDENTIFICATION OF ISOTOPICALLY PURE GERMANIUM SINGLE CRYSTAL | 2023 |
|
RU2813061C1 |
| SILICON ISOTOPES SEPARATION PROCESS | 2000 |
|
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| METHOD FOR OBTAINING HIGHLY PROCESSED ZIRCONIUM ISOTOPES | 2016 |
|
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| METHOD FOR SEPARATING ISOTOPES OF LANTHANIDES AND THORIUM USING GAS CENTRIFUGE METHOD | 2020 |
|
RU2753033C1 |
| BORON ISOTOPE SEPARATION METHOD | 2021 |
|
RU2777556C1 |
| METHOD OF PREPARATION OF COMPONENTS FOR MAKING OPTICAL AND SEMICONDUCTOR MATERIALS | 1998 |
|
RU2152349C1 |
| METHOD OF PRODUCTION OF HIGHLY ENRICHED ISOTOPES OF VANADIUM | 2002 |
|
RU2226424C2 |
