METHOD OF THE MULTI-PIN AUTO EMISSION CATHODE MATRIX MANUFACTURING ON A MONO-CRYSTALLINE SILICON Russian patent published in 2018 - IPC H01J1/30 H01J9/02 

FIELD: electronics.

SUBSTANCE: invention relates to the field of electronic engineering and can be used in the light-indicating technology and emission electronics products manufacturing based on field emission of the multi-point emitters matrix on single-crystal silicon plates. Multi-tip auto emission cathode matrix production in the form of columnar emission centres up to several tens of nanometers in height is performed on single-crystal silicon plates by high anisotropic etching, using sub-monolayer carbon coatings as a mask obtained as a result of self-organization and structuring phenomena into nano-island formations with deposition in the microwave gas discharge plasma from the carbonaceous substances vapours, for example, ethanol. To increase the working current density and the current collection long-term stability under technical vacuum conditions, performing the high-dose carbon implantation into the multi-tip auto emission cathode columnar emission centres. Multi-tip auto emission cathode matrix is manufactured using a low-temperature technology compatible with the silicon integrated circuits production technology.

EFFECT: technical result is increase in the auto emission current working density and long-term stability under the technical vacuum conditions.

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