FIELD: electronic equipment.
SUBSTANCE: invention relates to electronic engineering and can be used in making light-indicator equipment and vacuum-plasma microelectronics based on electron field emission of multi-tip carbon structures. Synthesis of electron field emission cathode material is carried out in plasma of microwave gas discharge from vapours of carbon-containing substances, for example, ethanol in the range of process parameters, in which transition from deposition of graphite films to deposition of diamond films is realized. Formed composite material is a graphite matrix with inclusions of nanodiamond crystallites. Surface of the composite nanodiamond-graphite film structures is additionally subjected to plasma-chemical treatment in a fluorocarbon gas medium, for example, CF4, followed by vacuum annealing.
EFFECT: higher efficiency of electron field emission cathodes and density of electron field emission currents.
1 cl, 3 dwg
