FIELD: power industry.
SUBSTANCE: plasma reactor includes microwave generator, transmission line ending with quasi-optical electrodynamic system, and reaction chamber with base installed in it for deposition of diamond film. Transmission line is made in the form of common waveguide system combining the output waveguide of microwave generator with emission on operating mode and divider of one beam into two equal wave beams. Reaction chamber is made in the form of closed solid metal convex screen with possibility of reflecting the microwave emission dissipated to the base. Mirrors of quasi-optical electrodynamic system are fixed inside reaction chamber on its side wall.
EFFECT: considerable reduction of losses of microwave energy both during its transmission from microwave generator to reaction chamber, and in reaction chamber itself.
3 cl, 2 dwg
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