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2 422 359

(13)

(51)

IPC

C01B33/107(2006-01-01)

(21) (22)

Application

2009146462/05, 2009-12-14

(24)

Start date

2009-12-14

(22)

Actual filing date

2009-12-14

(45)

Published

2011-06-27

(72)

Inventor

Gromov Oleg BorisovichRybakov Anatolij GeorgievichGurdina Ekaterina Leonidovna

(73)

Holder

Rossijskaja Federatsija, Ot Imeni Kotoroj Vystupaet Gosudarstvennaja Korporatsija Po Atomnoj EhnergiiOtkrytoe Aktsionernoe Obshchestvo Nauchno-Issledovatel'Skij Institut Khimicheskoj Tekhnologii"

METHOD OF REMOVING PHOSPHORUS FLUORIDE VOLATILE IMPURITIES FROM SILICON TETRAFLUORIDE Russian patent published in 2011 - IPC C01B33/107

Abstract RU 2422359 C1

FIELD: chemistry.

SUBSTANCE: invention can be used in the of polycrystalline silicon. Silicon tetrafluoride and volatile phosphorus fluorides undergo combined sorption on sodium fluoride at temperature 200-250°C. Water vapour is fed at temperature 450-550°C, and purified silicon tetrafluoride is desorbed and condensed.

EFFECT: invention enables to obtain silicon tetrafluoride with purity of up to 99,7%.

1 tbl, 1 ex

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RU 2 422 359 C1

Authors

Gromov Oleg Borisovich

Rybakov Anatolij Georgievich

Gurdina Ekaterina Leonidovna

Dates

2011-06-27—Published

2009-12-14—Filed