FIELD: chemistry.
SUBSTANCE: semiconductor base is made from a nanosized film of gallium antimonide doped with zinc telluride. The electrode platform of a piezoelectric crystal resonator serves as the substrate.
EFFECT: high sensitivity of the sensor and its manufacturability.
1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| SEMICONDUCTOR GAS ANALYSER | 2009 |
|
RU2398219C1 |
| GAS ANALYSER OF CARBON OXIDE | 2009 |
|
RU2395799C1 |
| SEMICONDUCTOR AMMONIA TRACE CONTAMINATION SENSOR | 2015 |
|
RU2589455C1 |
| SEMICONDUCTOR GAS SENSOR OF AMMONIA TRACE IMPURITIES | 2015 |
|
RU2607733C1 |
| SEMICONDUCTOR GAS SENSOR OF TRACE OXYGEN MICRO IMPURITIES | 2019 |
|
RU2710523C1 |
| SEMICONDUCTOR GAS SENSOR OF TRACE IMPURITIES OF OXYGEN | 2015 |
|
RU2603337C1 |
| SEMICONDUCTOR GAS ANALYSER | 2011 |
|
RU2469300C1 |
| NANO-SEMICONDUCTOR GAS SENSOR | 2010 |
|
RU2422811C1 |
| SEMICONDUCTING GAS ANALYSER | 2007 |
|
RU2350936C1 |
| SEMICONDUCTOR SENSOR OF AMMONIA TRACE SUBSTANCES | 2016 |
|
RU2641016C2 |
