DEVICE TO MEASURE ELECTROPHYSICAL PARAMETERS OF SEMICONDUCTORS BY CONTACTLESS UHF METHOD Russian patent published in 2011 - IPC G01R31/265 G01N22/00 

Abstract RU 2430383 C1

FIELD: physics.

SUBSTANCE: invention relates to using probing electromagnetic UHF-radiation for defining lifetime of nonequilibrium charge carriers in semiconductor plates and ingots by contactless UHF method. Proposed device with controlled UHF unit, measuring unit, UHF resonator, automatic computer-aided calibration and measurement unit includes UHF resonator made up of dielectric substrate with laser diode secured on its one completely metallised shield side and strip conductor made on its opposite side and coiled so that its opposite ends are passed together through gap. Note that through hole is made between said ends for laser diode beam to pass there through.

EFFECT: higher accuracy of measurement.

2 dwg

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RU 2 430 383 C1

Authors

Vladimirov Valerij Mikhajlovich

Markov Vladimir Vital'Evich

Martynovskij Vladimir Nikolaevich

Shepov Vladimir Nikolaevich

Dates

2011-09-27Published

2010-02-09Filed