DEVICE FOR SPUTTERING THIN LAYERS IN MULTI-LAYER ITEMS IN VACUUM Russian patent published in 2011 - IPC C23C14/04 

Abstract RU 2432417 C1

FIELD: metallurgy.

SUBSTANCE: device consists of mask of ferro-magnetic material 8 placed on face side of substrate 3 and of magnet 4 with flat upper surface positioned on side of substrate 3 opposite relative to mask 8. Additionally, the device consists of case 1 with flat upper surface and flat seat 2 for substrate 3. Depth of the seat facilitates arrangement of upper surface of substrate 3 and upper flat surface of case 1 in one plane. A bottom of flat seat 2 is formed with flat upper surface of magnet 4. Stops 5 and hold-down screws 6 fixing position of substrate 3 in seat 2 are set on side surfaces of flat seat 2 along perimetre. On upper flat surface case 1 has lugs 7 fixing position of mask 8 with fitment bores 9 for lugs 7.

EFFECT: facilitating replacement of ferro-magnetic masks without disassembly of whole packing and magnet removal.

2 dwg

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Authors

Usov Nikolaj Nikolaevich

Chetverov Jurij Stepanovich

Stakharnyj Sergej Alekseevich

Kudrjavtsev Pavel Nikolaevich

Nesterova Elena Vasil'Evna

Zvonova Marina Mikhajlovna

Gerasimenko Marina Aleksandrovna

Stoljarova Svetlana Pavlovna

Dates

2011-10-27Published

2010-04-27Filed