DEVICE FOR FORMING THE CONFIGURATION OF FILMS SPRAYED IN VACUUM Russian patent published in 2023 - IPC C23C14/04 

FIELD: microelectronics.

SUBSTANCE: The invention relates to the field of microelectronics and can be used to form the configuration of films sprayed in vacuum. The device for forming the configuration of films sprayed in vacuum includes a mask of ferromagnetic material located on the front side of the substrate, and magnets in the form of strips with alternating poles and with a flat upper surface located on the back side of the substrate opposite to the said mask, a housing with a flat upper surface and a flat socket for the substrate, and with protrusions on its flat upper surface. A bimetallic mask made of beryllium bronze with a layer of nickel applied between the mask made of ferromagnetic material and the front surface of the substrate. Two landing holes are made in the mentioned housing, a bimetallic mask and a mask made of ferromagnetic material, on each side of the substrate, each of which overlaps by 0.4-0.5 diameter on the plane of the substrate. A bimetallic mask and a mask made of ferromagnetic material are pressed against the substrate by a pressure frame made of ferromagnetic material having holes for securing it on the protrusions on the said housing.

EFFECT: The present invention enables to increase the accuracy of obtaining the configuration of layers when spraying through a mask and prevents the interaction of the field of permanent magnets located on the back of the substrate with the magnetic field of magnetron sources of spraying materials.

7 cl, 4 dwg