NANOSTRUCTURED COATINGS FROM THE REFRACTORY METALS CARBIDES OBTAINING METHOD Russian patent published in 2019 - IPC C23C14/35 C23C14/02 

FIELD: technological processes.

SUBSTANCE: invention relates to the carbides and refractory metals coatings onto the substrate application methods by the magnetron sputtering. Method comprises the surface mechanical cleaning and degreasing, coating application by the mosaic target spraying in the magnetron sputtering system. In the inert gas environment, prior to the magnetron sputtering beginning, performing 5–10 cycles of the surface pulsed photon treatment (PPT) in the ultraviolet spectrum. Then, simultaneously with the PPT, magnetron sputtering is performed, wherein the incoming radiation power is chosen with the possibility of ensuring the substrate surface layer point defects formation, but insufficient for its heating above 10 % of the condensed material melting temperature, the PPT pulses duration is not more than 2 seconds, and the intervals between pulses are not less than 0.5 s.

EFFECT: obtaining coatings with increased hardness, wear resistance under contact loads, high values of the service life under various types of friction, chemical inertness in the wide range of temperatures.

3 cl, 2 dwg, 1 ex