FIELD: technological processes.
SUBSTANCE: invention relates to the carbides and refractory metals coatings onto the substrate application methods by the magnetron sputtering. Method comprises the surface mechanical cleaning and degreasing, coating application by the mosaic target spraying in the magnetron sputtering system. In the inert gas environment, prior to the magnetron sputtering beginning, performing 5–10 cycles of the surface pulsed photon treatment (PPT) in the ultraviolet spectrum. Then, simultaneously with the PPT, magnetron sputtering is performed, wherein the incoming radiation power is chosen with the possibility of ensuring the substrate surface layer point defects formation, but insufficient for its heating above 10 % of the condensed material melting temperature, the PPT pulses duration is not more than 2 seconds, and the intervals between pulses are not less than 0.5 s.
EFFECT: obtaining coatings with increased hardness, wear resistance under contact loads, high values of the service life under various types of friction, chemical inertness in the wide range of temperatures.
3 cl, 2 dwg, 1 ex
Title | Year | Author | Number |
---|---|---|---|
METHOD FOR VACUUM-ARC DEPOSITION OF NANOSTRUCTURED COATINGS ON DENTAL STRUCTURES | 2022 |
|
RU2791571C1 |
METHOD OF OBTAINING COMPLEX NITRIDE-BASED COATING | 2010 |
|
RU2429311C1 |
METHOD FOR OBTAINING THE SOLID REGULARLY LOCATED WHISKERS | 2017 |
|
RU2657094C1 |
METHOD FOR CREATING GOLD NANOSTRUCTURES WITH SOLID BEAMS | 2022 |
|
RU2788570C1 |
METHOD OF FORMING NANOSIZED CONDUCTING ELEMENT | 2011 |
|
RU2478239C1 |
METHOD FOR CREATING QUANTUM DOTS FOR ELEMENT BASE OF RADIO ENGINEERING | 2020 |
|
RU2753399C1 |
METHOD OF MODIFYING THE FOIL SURFACE FOR ELECTROLYTIC CAPACITORS | 2019 |
|
RU2716700C1 |
METHOD TO PRODUCE NANOCRYSTALLINE FILMS OF RUTILE | 2010 |
|
RU2436727C2 |
METHOD TO PRODUCE NANOSTRUCTURED MULTILAYER 3D COMPOSITE MATERIAL FOR NEGATIVE ELECTRODE OF LITHIUM-ION BATTERY, COMPOSITE MATERIAL, NEGATIVE ELECTRODE AND LITHIUM-ION BATTERY | 2011 |
|
RU2459319C1 |
METHOD FOR SYNTHESISING NANOCRYSTALLINE SILICON CARBIDE FILMS ON A SILICON SUBSTRATE | 2022 |
|
RU2789692C1 |
Authors
Dates
2019-07-11—Published
2018-07-04—Filed