FIELD: physics.
SUBSTANCE: capacitive sensor for measuring parameters of angular motion of objects has a rotor and a stator, which are in form of two discs of dielectric material, six inductance coils and a measuring circuit. The rotor is made from piezoelectric material and is mounted on an ultrasonic suspension in the support between the stator and a cover and operates as an inertia mass. The sensor is additionally fitted with two exciting capacitor electrodes and six oscillating circuits which are galvanically isolated from the measuring circuit, which contain six inductance coils, as well as sections of six electrodes of three oscillating circuits, uniformly distributed on a circle on the side of the stator facing the rotor, sections of six electrodes of three oscillating circuits uniformly distributed on a circle of smaller diameter on the side of the stator facing the rotor, sections of the common electrode of three oscillating circuits uniformly distributed on a circle on the side of the rotor facing the stator, over sections of six electrodes of three oscillating circuits, sections of the common electrode of three oscillating circuits uniformly distributed on a circle of smaller diameter on the side of the rotor facing the stator, over sections of six electrodes of three oscillating circuits. The measuring circuit comprises six inductance coils for pumping energy into six oscillating circuits and six inductance coils for reading resonance frequency of oscillations of six oscillating circuits. All inductance coils are made by winding wire onto six dielectric frames which are placed on a circle on the outer side of the stator. The two exciting capacitor electrodes are in form of two metal rings and are placed on sides of the stator and the cover facing each other.
EFFECT: high accuracy and sensitivity of measurements.
3 cl, 11 dwg
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Authors
Dates
2012-03-20—Published
2010-11-13—Filed