STRUCTURE AND METHOD OF MAKING INTEGRATED FIELD-EMISSION ELEMENTS HAVING NANODIAMOND COATING-BASED EMITTERS Russian patent published in 2012 - IPC H01J9/02 B82B1/00 B82B3/00 

FIELD: physics.

SUBSTANCE: invention relates to electronics and can be used in making vacuum microelectronic devices. The essence of the invention lies in that the integrated field-emission element has a substrate coated with a dielectric layer, a cathode structure consisting of one or more layers of electroconductive material and lying on the outer surface of said substrate, a support structure lying on the top surface of said cathode structure and having through-holes inside of which cathodes are formed based on nanodiamond coatings, lying on the outer surface of the cathode structure, an anode layer made from electroconductive material lying on the outer surface of said support structure and having working holes superimposed with said holes in the support structure The nanodiamond coating-based emitter is made in a single process cycle with formation of anode structures without a further process of superimposing the anodes with the cathode structure.

EFFECT: use of nanodiamond coatings as emitter material, said coatings being carbon films containing nanostructured diamond components, which results in higher resistance to disintegration, current density and low operating voltage in integrated vacuum nano- and microelectronic devices.

4 cl, 8 dwg