METHOD OF FORMING OBJECTS ON SURFACE OF MATERIALS USING FOCUSED ION BEAM Russian patent published in 2012 - IPC H01L21/26 B82B3/00 

FIELD: physics.

SUBSTANCE: object with given geometric parameters is formed on the surface of materials using a focused ion beam. First, (n×n) markers are written on the surface of the object on a square or rectangular grid using a focused ion beam and the shift from given coordinates of markers is determined, after which a mathematical model of the surface is formed based on the obtained data and approximation of the degree (n-1). In the simplest case, the mathematical model of the surface is formed based on data of four markers and linear approximation; the model is corrected using known data on the geometry of the surface. According to the mathematical model of the surface, mechanical and electronic combination of ion and electron optics is carried out and an object with given geometric parameters is formed on the surface of the material using a focused ion beam.

EFFECT: 7 to 18-fold increase in accuracy of forming an object with nanometre dimensions on the surface of material and high technological effectiveness of the method of forming such objects.

3 cl, 11 dwg