METHOD OF OBTAINING THIN-FILM COPPER-GERMANIUM JOINT Russian patent published in 2012 - IPC H01L21/28 

Abstract RU 2458429 C1

FIELD: physics.

SUBSTANCE: method of obtaining a thin-film copper-germanium joint involves successive deposition of Ge and Cu layers on the surface of a plate and forming a thin-film copper-germanium joint which is carried out over a time t≥0.5 minutes in an atmosphere of atomic hydrogen at temperature T=20-120°C and hydrogen atom flux density on the surface of the plate equal to 1013-1016 at.cm-2 s-1.

EFFECT: lower temperature and shorter time for obtaining a thin-film copper-germanium joint.

7 cl, 6 dwg

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RU 2 458 429 C1

Authors

Erofeev Evgenij Viktorovich

Kazimirov Artem Igorevich

Kagadej Valerij Alekseevich

Dates

2012-08-10Published

2011-03-10Filed