FIELD: gas analysis.
SUBSTANCE: invention relates to gas analysis, in particular to detection devices used for recording and measuring the ammonia trace content. The invention can be used for environmental monitoring. The sensor comprises a semiconductor base and a substrate. The semiconductor base is made of a polycrystalline film of a solid solution of a composition (CdS)0,63(CdTe)0,37, and the substrate is served by an electrode platform of a piezoquartz resonator. The claimed sensor, with the substantial simplification of the manufacturing process thereof, enables determining the ammonia content with sensitivity several times greater than that of known sensors.
EFFECT: increased sensitivity and technological efficiency of the sensor production.
1 cl, 3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| TRACE AMMONIA SENSOR | 2021 |
|
RU2772443C1 |
| MICROIMPURITIES OF AMMONIA SENSOR | 2019 |
|
RU2700035C1 |
| AMMONIA TRACE CONTAMINANT SENSOR | 2017 |
|
RU2652646C1 |
| TRACE AMMONIA SENSOR | 2023 |
|
RU2797767C1 |
| AMMONIA SEMICONDUCTOR SENSOR | 2015 |
|
RU2613482C1 |
| NANOSEMICONDUCTOR GAS SENSOR | 2013 |
|
RU2530455C1 |
| SEMICONDUCTOR GAS SENSOR OF AMMONIA TRACE IMPURITIES | 2015 |
|
RU2607733C1 |
| AMMONIA TRACE CONTAMINANT DETECTOR | 2008 |
|
RU2400737C2 |
| SEMICONDUCTIVE ANALYZER OF AMMONIA | 2016 |
|
RU2631009C2 |
| SEMICONDUCTOR GAS SENSOR | 2005 |
|
RU2281485C1 |
