FIELD: measuring instrumentation.
SUBSTANCE: ammonia trace contamination sensor includes semiconductor base and substrate. Semiconductor base is made out of polycrystalline cadmium sulphide nanofilm reinforced with cadmium telluride. Electrode pad of pieso-quartz resonator serves as substrate.
EFFECT: significantly simpler design of sensor, several times higher sensitivity than that of existing sensors.
3 dwg
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|
RU2613482C1 |
AMMONIA TRACE CONTAMINANT DETECTOR | 2008 |
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RU2607733C1 |
NITROGEN DIOXIDE INDICATOR | 2004 |
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RU2274853C1 |
PIEZO-RESONANCE GAS INDICATOR | 2004 |
|
RU2274854C1 |
SEMICONDUCTOR GAS SENSOR | 2005 |
|
RU2281485C1 |
TRACE AMMONIA SENSOR | 2023 |
|
RU2797767C1 |
AMMONIA TRACE CONTAMINANT SENSOR | 2017 |
|
RU2652646C1 |
AMMONIA TRACE SENSOR | 2020 |
|
RU2743155C1 |
NANO-SEMICONDUCTOR GAS SENSOR | 2010 |
|
RU2458338C2 |
Authors
Dates
2014-10-10—Published
2013-02-08—Filed