METHOD OF MAKING MICROSYSTEM FOR DETECTING THREE MAGNETIC INDUCTION VECTOR COMPONENTS Russian patent published in 2012 - IPC H01L21/77 

FIELD: physics.

SUBSTANCE: invention relates to micro- and nanoelectronics and can be used in producing hybrid microsystems for analysing a weak magnetic field. The method of making a microsystem for detecting three magnetic induction vector components involves forming on the surface of a silicon wafer a first dielectric layer of silicon nitride with a silicon oxide underlayer, forming a metal-coated interconnection and contact pads, depositing a second dielectric layer of silicon dioxide, forming windows in the second dielectric layer to the metal layer, forming a window in the first dielectric layer in the central region of the wafer to silicon, dry anisotropic etching of silicon in said window by a depth not less than half the thickness of the silicon wafer, gluing onto the silicon wafer two chips of magnetoresistive transducers with sensitivity axes on the X and Y directions, with the reverse side and end faces tightly against each other, putting the chip of the magnetoresistive transducer with the sensitivity axis on the Z direction with the end face in the window with the etched silicon in the central region, with its back side tightly adjoining the end faces of the chips, placing the signal amplification microchip, splicing the contact pads and filling with a compound.

EFFECT: invention increases accuracy of detecting the direction of the magnetic induction vector, high resolution and sensitivity, reliability, smaller weight and size.

3 cl, 2 dwg