FIELD: electricity.
SUBSTANCE: detection device is proposed, designed for detection of radiation, comprising the following components: a substrate; a switching element, arranged above the substrate and including many electrodes; a conducting bus arranged above the substrate and electrically connected with the first electrode from many electrodes of the switching element; and a converting element, including a semiconducting layer arranged above the switching element and the conducting bus and arranged between two electrodes, besides, one electrode of two electrodes is electrically connected with the second electrode of many electrodes of the switching element. The specified one electrode of the converting element is arranged above the switching element and the conducting bus via a gap formed between the specified one electrode and the first electrode of the switching element, or between the specified one electrode and the conducting bus, at the same time the gap is formed by removal of a film covering the conducting bus and the switching element. Also a detection system is proposed, which comprises the above described detection device and the method to manufacture the detection device.
EFFECT: reduction of parasite capacitances between converting elements and switching elements or conducting buses.
10 cl, 10 dwg
