FIELD: process engineering.
SUBSTANCE: proposed plant comprises reactor, raw stock feed device to feed metal silicon into reactor, gas feed device to force hydrogen chloride into reactor to make it react with metal silicon powder and to be fluidised by said hydrogen chloride gas, gas removal device to release generated gas bearing trichlorosilane from reactor top section, multiple heat transfer pipes spaced apart in annular space nearby reactor peripheral wall, and multiple gas flow control elements arranged in central space surrounded by heat transfer tubes in vertical direction. Note here that every said gas flow control element is stopped on both ends.
EFFECT: higher-efficiency reaction.
5 cl, 7 dwg
Authors
Dates
2013-03-10—Published
2008-10-20—Filed