FIELD: chemistry.
SUBSTANCE: method includes reacting silicon with gaseous HCl at temperature between 250°C and 1100°C and absolute pressure of 0.5-30 atm. The process can be carried out in a fluidised bed reactor, a stirred bed reactor or a solid bed reactor. The silicon fed for reaction contains 40-10000 ppm barium by weight and optionally 40-10000 ppm copper by weight.
EFFECT: high selectivity of the process of producing trichlorosilane.
14 cl, 4 dwg, 2 tbl, 4 ex
Authors
Dates
2014-09-27—Published
2011-07-06—Filed