METHOD OF MAKING THIN FILMS OF CHEMICAL COMPOUNDS AND INSTALLATION FOR REALISING SAID METHOD Russian patent published in 2010 - IPC C08J5/18 C23C16/455 

FIELD: chemistry.

SUBSTANCE: invention relates to methods and devices for making thin films of coordination compounds. The method involves conversion of initial compounds to a gas phase in spatially isolated areas, their separate transportation to a gas phase reaction zone through a carrier gas and deposition of a thin film. One of the initial compounds is fed into the reaction zone filled with a second initial compound in a direction perpendicular the direction of the substrate, and the initial compounds are mixed in the immediate proximity of the substrate. The installation for realising the method has three zones joined together and separately temperature-controlled - (1) and (2) for converting the initial compounds to gas phase and (3) for carrying out the gas phase reaction. Also the device has a substrate holder (4) placed in zone (3), outlets (6) and (7) for carrier gas into zones (1) and (2) respectively and an outlet (8) for the carrier gas from the installation, placed in zone (3) behind the substrate holder (4). Zones (1) and (3) are joined with possibility of moving carrier gas from zone (1) to zone (3) through outlet (5) whose cross sectional area is less than that of zone (3) and whose end lies closer to the substrate holder (4) than the connection point of zones (2) and (3).

EFFECT: obtaining films with given composition and with necessary characteristics.

1 dwg, 1 ex