FIELD: physics.
SUBSTANCE: device is made in form two-stepped micro-bridge which has upper detector planar section which includes thermo-sensitive element made of vanadium oxide, which has high temperature resistance coefficient and specific resistance in range from 20 kOhm to 50 kOhm for square of surface layer and is supported above lower section with use of supports made of vanadium oxide, which have specific resistance of about 500 kOhm for square of surface layer.
EFFECT: lesser mass, lesser energy consumption.
6 cl, 4 dwg
