METHOD TO PRODUCE TRANSPARENT CONDUCTING FILM InSnO Russian patent published in 2013 - IPC C23D5/02 

FIELD: metallurgy.

SUBSTANCE: Sn and In are extracted from aqueous solutions of their salts by carbonic acids to produce extracts of indium and stannum. Extracts of In and Sn are mixed at the ratio of 9:1, the mixture of extracts is applied onto the substrate, which is centrifuged for even spreading of extracts, dried at 100-130°C for 1 minute and further exposed to pyrolysis on air at 400-500°C until decomposition of organic phases and burnt. Application of the mixture of In and Sn extracts, centrifuging, drying and pyrolysis are cycled from 5 to 30 times depending on the required thickness of the produced film. Burning is done on air at 450°C for 1 hour, or in vacuum at 300°C for 3 min.

EFFECT: increased purity and homogeneity of ITO films due to usage of solutions of indium and stannum extracts, and also preservation of concentration of a solution during storage and improved wettability of a substrate with minimum costs.

3 cl, 5 dwg, 1 tbl, 1 ex