FIELD: nanotechnology.
SUBSTANCE: method of preparation and measurement of the surface of the large-sized object with the scanning probe microscope, including the formation of the measurement surface by mechanical means and the first study of the measurement surface, additionally, on the large-sized object the mounting area is formed, on which the scanning probe microscope is mounted.
EFFECT: increased accuracy of measurements, expansion of their functional capabilities.
8 cl, 1 dwg
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