FIELD: metallurgy.
SUBSTANCE: transparent current-conducting coating from metal oxide is applied onto a substrate by sputtering at least of one coating component from metal oxide by applying a pulse magnetron method and its condensation on the substrate. Peak density of pulse strength of the magnetron comprises over 1.5 kW/cm2; duration of the magnetron pulses is ≤200 mcs, and average increase of density of the flowing current at plasma ignition at time interval of 0.025 ms is at least 106 A/(ms·cm2).
EFFECT: method allows obtaining optimum properties of the coating from metal oxide, and namely in relation to mechanical and chemical resistance, strength and optic device.
14 cl, 2 dwg
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