FIELD: physics.
SUBSTANCE: apparatus for depositing superconducting layers has a deposition chamber with a heating area through which an elongated substrate moves; a pulse-periodic laser focused on a target coated with superconducting material; a mechanism for moving the pulse-periodic laser beam on the surface of the target from which, as a result of pulsed laser ablation, the material is separated and blasted into the heated elongated substrate; a mechanism for moving the target and a unit for controlling successive movements of the laser beam and movement of the target. The mechanism for moving the target has a constantly rotating shaft on which the target is mounted, having axial symmetry relative the axis of rotation, parallel to the direction of movement of the substrate through the heating area.
EFFECT: simplifying the apparatus while increasing the rate of depositing superconducting layers.
3 cl, 1 dwg
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Authors
Dates
2013-12-27—Published
2012-09-20—Filed