APPARATUS AND METHOD OF DEPOSITING SUPERCONDUCTING LAYERS Russian patent published in 2013 - IPC H01L39/24 

Abstract RU 2503096 C1

FIELD: physics.

SUBSTANCE: apparatus for depositing superconducting layers has a deposition chamber with a heating area through which an elongated substrate moves; a pulse-periodic laser focused on a target coated with superconducting material; a mechanism for moving the pulse-periodic laser beam on the surface of the target from which, as a result of pulsed laser ablation, the material is separated and blasted into the heated elongated substrate; a mechanism for moving the target and a unit for controlling successive movements of the laser beam and movement of the target. The mechanism for moving the target has a constantly rotating shaft on which the target is mounted, having axial symmetry relative the axis of rotation, parallel to the direction of movement of the substrate through the heating area.

EFFECT: simplifying the apparatus while increasing the rate of depositing superconducting layers.

3 cl, 1 dwg

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RU 2 503 096 C1

Authors

Borisov Vladimir Mikhajlovich

Smirnov Nikolaj Jakovlevich

Trofimov Viktor Nikolaevich

Khristoforov Oleg Borisovich

Cherkovets Vladimir Evgen'Evich

Dates

2013-12-27Published

2012-09-20Filed