FIELD: electricity.
SUBSTANCE: method of MDM-cathode manufacturing is intended to increase a density of emission current and homogeneity of its distribution along the surface. A metal lower electrode based on a molybdenum film, then two layers of resistors where the pattern is generated by means of electron-beam lithography are deposited in sequence to a substrate, then a continuous film of molybdenum is sprayed. The nanofluidic structure is obtained by explosion of the resist mask in the form of pyramids with the base of 260 nm, vertex of 40 nm, height of 250 nm and density of 3·108 cm-2.
EFFECT: improvement in even distribution of emissive centres and the density of emission current.
2 dwg
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