FIELD: physics.
SUBSTANCE: invention relates to electronic engineering. The method of making a MIM cathode includes depositing, on a substrate, a lower electrode, an insulator, a top electrode and moulding the structure. A nano-needle structure is formed on the lower electrode in form of columns with density of 5·10 cm-2 by electrochemical deposition of a metal through a pattern made of polymer film with through-pores.
EFFECT: high emission current and uniformity thereof on the surface of the MIM-cathode.
2 dwg
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