METHOD OF FORMING MAGNETIC PATTERNED STRUCTURE IN NON-MAGNETIC MATRIX Russian patent published in 2014 - IPC H01L21/263 B82B3/00 

FIELD: chemistry.

SUBSTANCE: method of forming a magnetic patterned structure in a non-magnetic matrix includes the formation of a working layer of oxides or nitrides of magnetic materials on a substrate, the application on it of an intermediate layer from a substance with a parameter of a crystalline lattice, different from the parameter of the crystalline lattice of the working layer substance by a value not more than 15%, and with a thickness not less than 5 nm, further application of a protective mask with a specified topology onto an intermediate layer and radiation through its by a flow of accelerated particles with energy, sufficient for the selective removal of oxygen or nitrogen atoms.

EFFECT: reduction of dimensions of magnetic elements.

3 cl, 2 dwg