METHOD OF FORMING NANOSCALE STRUCTURES Russian patent published in 2014 - IPC H01L21/20 B82B1/00 

FIELD: nanotechnology.

SUBSTANCE: method of forming nanoscale structures is designed to produce strips of thin films of nanoscale width with the purpose of their study and formation of elements of nanoelectromechanical systems (NEMS). In the method of forming the nanoscale structures comprising obtaining the preforms of thin films and selection of strips of thin films from them, at least one thin film preform is fixed inside the filled volume, which is mounted in a microtome holder so that the plane of the thin film preform is not parallel to the plane of cutting, after that cutting of the filled volume is carried out with the knife of at least one thin film preform and a flat fragment with a thin film strip is obtained. There are embodiments in which the filled volume is set in a microtome holder so that the plane of the thin film preform is perpendicular to the plane of cutting and perpendicular to the direction of cutting; or the filled volume is set in the microtome holder so that the plane of the thin film preform is perpendicular to the plane of cutting and parallel to the direction of cutting. There are also embodiments in which after the cutting is carried out the investigation is carried out with the probe of a scanning probe microscope of the surface of the filled volume with at least one thin film preform; or modification is carried out of the thin film preform located inside the filled volume. There are also embodiments in which the modification of the thin film preform is the mechanical exposure with a probe to it; or the electric exposure with a probe to it; or electrochemical exposure with a probe to it; or exposure to it with an electron beam; or exposure to it with an ion beam; or exposure to it with an X-ray beam; or exposure to it with a beam of alpha-particles; or exposure to it with a beam of protons; or exposure to it with beam of neutrons. There is also an embodiment in which the inside filled volume a set of thin film preforms is fixed; and the thin film preforms are located parallel to each other. There is also an embodiment in which the thin film is used as graphene.

EFFECT: all of the above embodiments of the method extend its functional capabilities.

17 cl, 5 dwg