FIELD: gas analysis, in particular, engineering of detecting devices, used for registration and measurement of content of micro-admixtures of nitrogen and other gases.
SUBSTANCE: sensor has substrate and semiconductor base. Substrate is made of piezo-quartz resonator, and semiconductor base - of polycrystalline film of cadmium telluride, applied to electronic area of piezo-quartz generator.
EFFECT: increased sensitivity and manufacturability of sensor, expanded functional capabilities of the same.
3 dwg
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