HEATER FOR GROWTH OF MONOCRYSTALS FROM MELT BY VERTICAL PULLING TECHNIQUE Russian patent published in 2014 - IPC H05B3/02 C30B15/14 

Abstract RU 2531514 C1

FIELD: process engineering.

SUBSTANCE: proposed heater is arranged above melt in the area of crystallization front and shaped to ring-like disk. Part-through radial cut-outs are made at inner and/or outer lateral sides of said disc. Part-through radial cut-outs of inner and outer lateral sides of top heater alternate so that radial cut-outs of one lateral side are located between radial cut-outs of the other lateral side.

EFFECT: monocrystal dislocation density lower than 200 cm-2, uniform distribution of alloying impurities suitable for production solid-state germanium plates in diameter of 100 mm and thickness of smaller than 160 mcm.

8 cl, 4 dwg

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RU 2 531 514 C1

Authors

Alimov Oleg Mikhajlovich

Anoshin Konstantin Evgen'Evich

Ezhlov Vadim Sergeevich

Dates

2014-10-20Published

2013-06-28Filed