FIELD: process engineering.
SUBSTANCE: proposed heater is arranged above melt in the area of crystallization front and shaped to ring-like disk. Part-through radial cut-outs are made at inner and/or outer lateral sides of said disc. Part-through radial cut-outs of inner and outer lateral sides of top heater alternate so that radial cut-outs of one lateral side are located between radial cut-outs of the other lateral side.
EFFECT: monocrystal dislocation density lower than 200 cm-2, uniform distribution of alloying impurities suitable for production solid-state germanium plates in diameter of 100 mm and thickness of smaller than 160 mcm.
8 cl, 4 dwg
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Authors
Dates
2014-10-20—Published
2013-06-28—Filed