MICROMECHANICAL ACCELEROMETER Russian patent published in 2015 - IPC G01P15/97 G01P15/125 G01P15/02 

FIELD: measurement equipment.

SUBSTANCE: accelerometer comprises an inertia mass (1), which is fixed in an inner frame (2) with the help of torsions (3-6). Torsions (3-6) are placed in the micromechanical accelerometer as capable of making reciprocal oscillations of the inertia mass (1) along the axis X. On the inertia mass (1) there are movable electrodes (7, 8) of a motion sensor fixed, being made with comb-shaped structure at one side. On the inner frame (2) there are movable electrodes (9, 10) of the motion sensor are fixed, made with comb-shaped structures at one side. The inner frame (2) is fixed in an outer frame (11) with the help of torsions (12-15). Torsions (12-15) are placed in the micromechanical accelerometer as capable of making reciprocal oscillations of the inner frame (2) along the axis Y. The outer frame (11) is fixed in a body (16) with the help of torsions (17-20). Torsions (17-20) are placed in the micromechanical accelerometer as capable of making reciprocal oscillations of the outer frame (11) along the axis Z. On the outer frame (11) there are movable electrodes (21, 22) of a motion sensor fixed. The body (16) is fixed on a substrate (23), on which movable electrodes (24, 25) of the motion sensor are fixed, made with comb-shaped structures at one side. Fixed electrodes (24, 25) create capacitors with movable electrodes (7, 8) in the plane of their plates, forming at the same time a capacitance sensor of inertia mass (1) motion relative to the substrate (23). On the substrate (23) there are fixed electrodes (26, 27) of the motion sensor fixed, made with comb-shaped structures at one side. Fixed electrodes (26, 27) create capacitors with movable electrodes (9, 10) in the plane of their plates, forming at the same time a capacitance sensor of inner frame (2) motion relative to the substrate (23). On the substrate (23) there are fixed electrodes (28, 29) of the motion sensor fixed. Fixed electrodes (28, 29) create capacitors with movable electrodes (21, 22) in the plane of their plates, forming at the same time a capacitance sensor of outer frame (11) motion relative to the substrate (23). The inertia mass (1), the inner frame (2), the outer frame (11), torsions (3-6, 12-15, 17-20), movable electrodes (7-10, 21, 22) of motion sensors are arranged with a gap relative to the substrate (23). The inertia mass (1), the inner frame (2), the outer frame (11), torsions (3-6, 12-15, 17-20), movable electrodes (7-10, 21, 22) of motion sensors, fixed electrodes (24-29) of motion sensors, the body (16) are made of semiconductor materials, for instance, from single-crystal silicon. The substrate (23) may be made of dielectric, for instance, from borosilicate glass.

EFFECT: possibility to perform simultaneous measurements of accelerations along three mutually perpendicular axes X, Y, Z.

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