MICROMECHANICAL ACCELEROMETER Russian patent published in 2015 - IPC G01P15/97 G01P15/125 G01P15/02 

Abstract RU 2543686 C1

FIELD: measurement equipment.

SUBSTANCE: accelerometer comprises an inertia mass (1), which is fixed in an inner frame (2) with the help of torsions (3-6). Torsions (3-6) are placed in the micromechanical accelerometer as capable of making reciprocal oscillations of the inertia mass (1) along the axis X. On the inertia mass (1) there are movable electrodes (7, 8) of a motion sensor fixed, being made with comb-shaped structure at one side. On the inner frame (2) there are movable electrodes (9, 10) of the motion sensor are fixed, made with comb-shaped structures at one side. The inner frame (2) is fixed in an outer frame (11) with the help of torsions (12-15). Torsions (12-15) are placed in the micromechanical accelerometer as capable of making reciprocal oscillations of the inner frame (2) along the axis Y. The outer frame (11) is fixed in a body (16) with the help of torsions (17-20). Torsions (17-20) are placed in the micromechanical accelerometer as capable of making reciprocal oscillations of the outer frame (11) along the axis Z. On the outer frame (11) there are movable electrodes (21, 22) of a motion sensor fixed. The body (16) is fixed on a substrate (23), on which movable electrodes (24, 25) of the motion sensor are fixed, made with comb-shaped structures at one side. Fixed electrodes (24, 25) create capacitors with movable electrodes (7, 8) in the plane of their plates, forming at the same time a capacitance sensor of inertia mass (1) motion relative to the substrate (23). On the substrate (23) there are fixed electrodes (26, 27) of the motion sensor fixed, made with comb-shaped structures at one side. Fixed electrodes (26, 27) create capacitors with movable electrodes (9, 10) in the plane of their plates, forming at the same time a capacitance sensor of inner frame (2) motion relative to the substrate (23). On the substrate (23) there are fixed electrodes (28, 29) of the motion sensor fixed. Fixed electrodes (28, 29) create capacitors with movable electrodes (21, 22) in the plane of their plates, forming at the same time a capacitance sensor of outer frame (11) motion relative to the substrate (23). The inertia mass (1), the inner frame (2), the outer frame (11), torsions (3-6, 12-15, 17-20), movable electrodes (7-10, 21, 22) of motion sensors are arranged with a gap relative to the substrate (23). The inertia mass (1), the inner frame (2), the outer frame (11), torsions (3-6, 12-15, 17-20), movable electrodes (7-10, 21, 22) of motion sensors, fixed electrodes (24-29) of motion sensors, the body (16) are made of semiconductor materials, for instance, from single-crystal silicon. The substrate (23) may be made of dielectric, for instance, from borosilicate glass.

EFFECT: possibility to perform simultaneous measurements of accelerations along three mutually perpendicular axes X, Y, Z.

1 dwg

Similar patents RU2543686C1

Title Year Author Number
THREE-AXIS MICROMECHANICAL ACCELEROMETER 2018
  • Nesterenko Tamara Georgievna
  • Barbin Evgenij Sergeevich
  • Zorina Elena Vasilevna
  • Koleda Aleksej Nikolaevich
RU2693010C1
INTEGRAL MICROMECHANICAL GYROSCOPE-ACCELEROMETER 2011
  • Konoplev Boris Georgievich
  • Lysenko Igor' Evgen'Evich
RU2477863C1
INTEGRATED MICROMECHANICAL GYROSCOPE-ACCELEROMETER 2019
  • Ezhova Olga Aleksandrovna
  • Lysenko Igor Evgenevich
  • Sevostyanov Dmitrij Yurevich
  • Konoplev Boris Georgievich
RU2716869C1
INTEGRAL MICROMECHANICAL GYROSCOPE 2021
  • Lysenko Igor Evgenevich
  • Naumenko Danil Valerevich
  • Siniutin Sergei Alekseevich
  • Ezhova Olga Aleksandrovna
RU2778622C1
INTEGRATED MICROMECHANICAL ACCELEROMETER GYROSCOPE 2007
  • Konoplev Boris Georgievich
  • Lysenko Igor' Evgen'Evich
  • Sherova Elena Viktorovna
RU2351896C1
INTEGRATED MICROMECHANICAL ACCELEROMETER GYROSCOPE 2007
  • Konoplev Boris Georgievich
  • Lysenko Igor' Evgen'Evich
  • Sherova Elena Viktorovna
RU2351897C1
INTEGRAL MICROMECHANICAL GYROSCOPE-ACCELEROMETER 2015
  • Konoplev Boris Georgievich
  • Lysenko Igor Evgenevich
  • Bondarev Filipp Mikhajlovich
RU2597953C1
INTEGRAL MICRO MECHANICAL GYROSCOPE-ACCELEROMETER 2016
  • Konoplev Boris Georgievich
  • Lysenko Igor Evgenevich
  • Ezhova Olga Aleksandrovna
RU2649249C1
CNT-BASED INTEGRAL MICROMECHANICAL ACCELERATION MEASURING GYROSCOPE 2011
  • Konoplev Boris Georgievich
  • Lysenko Igor' Evgen'Evich
RU2455652C1
INTEGRAL MICROMECHANICAL GYROSCOPE-ACCELEROMETER ON BASIS OF CARBON NANOTUBES 2007
  • Konoplev Boris Georgievich
  • Lysenko Igor' Evgen'Evich
  • Polishchuk Elena Viktorovna
RU2334237C1

RU 2 543 686 C1

Authors

Nesterenko Tamara Georgievna

Koleda Aleksej Nikolaevich

Barbin Evgenij Sergeevich

Lysova Olga Mikhajlovna

Dates

2015-03-10Published

2013-10-16Filed