THREE-AXIS MICROMECHANICAL ACCELEROMETER Russian patent published in 2019 - IPC G01P15/135 

FIELD: measuring equipment.

SUBSTANCE: invention relates to microsystems and can be used for simultaneous measurement of linear accelerations along three mutually perpendicular axes. Accelerometer comprises substrate, fixed anchor blocks, outer rectangular frame arranged with clearance relative to substrate, divided by web into two equal squares and fixed on anchor blocks by means of flat elastic elements. Inside each square there are identical structures lying in the plane of the frame and turned through angle of 90 degrees relative to each other, each of which contains an inertial mass located in the center, an intermediate frame connected to the mass by means of rectangular elastic elements, wherein inertia masses are connected by Ω-shaped resilient elements to anchor units. Intermediate frame by means of two pairs of Ω-shaped resilient elements is fixed in square of external frame. On two opposite sides of each inertial mass there are comb electrodes forming flat capacitors in pair with fixed comb electrodes located on the substrate. Frame is equipped with planar electrodes forming flat capacitors with fixed planar electrodes arranged on substrate.

EFFECT: reduced sensitivity of the accelerometer to accelerations along the crosswise axes, wider range of technical means allowing measuring the acceleration of the object in three mutually perpendicular directions.

1 cl, 1 dwg