FIELD: chemistry.
SUBSTANCE: invention relates to metallurgy of obtaining especially pure materials and can be used in obtaining protective silicon carbide coating on quartz product by precipitation from gas phase on heated surface, applied for technological equipment in processes of obtaining especially pure elements and substances. Purification of said product and methane is carried out. When temperature of heating of said product reaches 950-1250°C, inert gas and then methane are blown through reactor with quartz product until required thickness of coating is obtained. After that, formed products of decomposition and substances that have not reacted are removed from reactor.
EFFECT: process of applying protective coating from silicon carbide is simplified.
1 dwg, 2 ex
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